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EUV_attPSM_near_field_phase.png (480 × 287 pixels, file size: 5 KB, MIME type: image/png)

Summary

Description
English: The near field phase profile (red) for an attenuated phase shift mask used with a partially transmitting EUV absorber does not match the ideal (dotted) profile. Reference: A. Erdmann et al., Proc. SPIE 10583, 1058312 (2018).
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Author Guiding light
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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2018-09-05 12:53:46 480 × 287 Guiding light
2018-09-05 12:25:30 480 × 287 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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5 September 2018

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Date/TimeThumbnailDimensionsUserComment
current22:25, 23 August 2019Thumbnail for version as of 22:25, 23 August 2019480 × 287 (5 KB)OgreBot(BOT): Reverting to most recent version before archival
22:25, 23 August 2019Thumbnail for version as of 22:25, 23 August 2019480 × 287 (5 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-09-05 12:25:30 by Guiding light
16:26, 20 August 2019Thumbnail for version as of 16:26, 20 August 2019480 × 287 (5 KB)Dave louis johnTransferred from en.wikipedia (MTC!) (1.1.0)

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