English: Left: Example of a 2D pattern with critical dimensions in both x (Mx) and y (Sy). Right: Different illumination shapes within the pupil (represented by the outer circle). One dimension requires a different illumination from the other due to different pitches in x and y. For k1<0.5, these illuminations (indicated by different color patches) may be exclusive, while for k1>0.5, they may overlap, allowing a conventional illumination shape (indicated by the dotted circle) to be used.
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